Scan Recipes - Feature Find KLA-Tencor P-16+ / P-6 User’s Guide
3-98 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Reference Point (µm) 3
The Reference Point is the x and y coordinates relative to the center of the
model that is used to define a different coordinate within the model as the
found location of the Feature Find scan. Recall that the offsets found during
the Feature Find scan become the center of the measurement scan. If the
model used does not have the desired reference point at the center of model,
the user can select a new location within the model as the reference point.
This is done by selecting a location with the mouse. In Figure 3.75, the
reference point shown is the center of the model, but in reality, the user might
want the edge of the first line as the reference point, shifting it left by about 5
μm.
Diagnostic Options 3
This dialog box presents options that can be used to run diagnostic scans such as No
Motion and No Nulling scans.
1. To display the
Diagnostic Options dialog box:
a. Click
Recipe in the menu bar to display its menu,
b. Click
Diagnostic... from the drop-down menu.
2. This displays the
Diagnostic Options dialog box.
To chose an option for a diagnostic scan, click in the empty checkbox next to the
desired option. A check (9) in the checkbox indicates that the option is chosen.
Each Option is discussed below.
3. Click
OK when all required options have been chosen.
NOTE: The Model Feature pattern recognition scores will be shown on
the status bar during the Feature Find scan. When optimizing the recipe,
these scores should be noted to ensure that the High and Low matching
scores are set properly. The pattern recognition algorithm will set all
scores below the Low matching score to zero percent, even if they are
non-zero. So during recipe optimization, set the Low matching score to
one percent so that all scores are displayed on the status bar, allowing
the user to find the best settings for the Matching Scores.
NOTE: Scans using these options should only be used by
KLA–Tencor service personnel or applications engineers for diagnostic
purposes only.
CAUTION: Each of the options is active for the recipe in which it is
saved. If the recipe is used as a template to create other recipes, the
option will remain intact unless turned off. This could create numerous
scan data deviations from the expected scan results.
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