XY View Screen - Using Die Grid Navigation (Optional Feature, P-16+ only) KLA-Tencor P-16+ / P-6 User’s Guide
4-18 KLA-Tencor Confidential 0142530-000 AB
3/13/09
In making it more convenient to position scans on a wafer, Die Grid Navigation
provides the following options:
Mask out the dies that are not to be measured. Masked dies appear blacked out
on the Die Grid Navigation Window, providing visual reference points.
Display the die coordinates on the Die Grid Navigation window and even
change the font and size of the numbers.
Show the partial dies on the edge of the wafer.
Creating a Die Grid 4
Introduction 4
To use a die grid, one must be created using a sample with clearly defined identical
dies, equally spaced. Once created, it can be used whenever measurements are being
made on samples which are identical to the one used to make the die grid. Numerous
die grids can be created, stored, and loaded as they are needed.
Wafer alignment on the sample stage is critical to the systems ability to consistently
locate dies on the wafer. It must be precisely placed with it X- Y- orientation identical
to that of the die grid. This can be accomplished by using a precision locator on the
sample stage. The loaded die grid pattern is accurate only as long as the wafer is not
moved after the initial die grid alignment procedure. This means that the vacuum
must be turned on when the wafer is loaded and not turned off until the wafer is
unloaded. If the wafer is moved, the die grid must be reloaded, a procedure which
realigns the wafer dies with the die grid.
The die grid is created by establishing its size and position on a wafer, and identifying
a unique and distinguishable feature which the system can use to locate the same
position on any die.
Teach a Di e Grid 4
Creating a die grid is a user friendly procedure. Once the Teach Die Grid procedure is
initiated, each step is prompted by a message at the bottom of the screen or next to the
graphic.
1. Click the
Scan Recipe or the Sequence Recipe button at the top of the option list
located at the left of the Catalog screen. (See Figure 4.13.)
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