KLA Tencor P-16+ - Figure 3.71 Edge of an Array of 5 ΜM Lines

0142530-000 AB KLA-Tencor Confidential 3-89
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Feature Find
Scan data is saved as model, such as the model shown below. This model is
for the edge of the array, with the top two lines including the 5
μm lines and
the bottom two lines including the flat surface below the array.
Figure 3.71 Edge of an Array of 5 µm Lines
Figure 3.72 Model Feature Search for the Edge of an Array of 5 μ m Lines