KLA Tencor P-16+ - Figure 12.13 Calibration Screen; Level Calibration Procedure

0142530-000 AB KLA-Tencor Confidential 12-13
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Calibrations - P-16 Series Level Calibrations
The Level Calibration should be performed whenever one of the following conditions
are present.
 System does not complete the initialization procedure
 Changing sample locators (e.g.: Adding a precision stress locator)
 Scans have excessiveraw non-level
Level Calibration Procedure 12
1. From from any top level screen, click on the Calibrations icon .
2. Click
Level… to open the Level Calibration screen.
Figure 12.13 Calibration Screen
Step 2 Click Level… to open
the calibration screen.