KLA Tencor P-16+ - Viewing the Correlation Scan Data

Sequence Recipe and Data - Correlation Scans KLA-Tencor P-16+ / P-6 User’s Guide
6-32 KLA-Tencor Confidential 0142530-000 AB
3/13/09
7. Teach the long scan position.
a. Press the
Teach LOC button.
b. Go to the location and click it. To accept the location, click
OK in the
dialog box that appears.
8. Teach the sub-scan position.
a. Press the
Teach LOC button.
b. Go to the location and click it. To accept the location, click
OK in the
dialog box that appears.
The Teach Sub-Scan window appears.
9. If the current position of the sub-scan is not close enough to the position of the
long scan for both to appear in the video image, a red arrow and the coordinates
of the long scan appears on the video image.
Move the stage in the direction of the arrow to bring the long scan into view.
The long scan is represented in the window by a red scan line; the sub-scan by
blue.
10. Position the sub-scan on the desired portion of the long scan line.
11. Click
OK.
The Sequence Editor returns to view.
12. Repeat for all sub-scans.
Viewing the Correlation Scan Data 6
1. Run the correlation sequence. Save the recipe and click Start.
The Analysis window appears, showing the results of the first recipe in the
sequence.
2. Click the
File menu, and select Correlation Scan.
The Correlation Scan dialog box appears.
3. Click the long scan