KLA Tencor P-16+ - Figure 7.15 Parameters Menu from the Analysis Screen Menu Bar

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3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Analyzing 3D Scan Data - 3D Analysis Screen Features
Parameters Menu 7
The Parameters Menu is designed to display the checked parameters in the analysis
data. This information is included and saved in the Surface Summary record. To
include the menu parameter in the Surface Summary, click next to it so that a check
appears. (See Figure 7.15.)
The General, Roughness, Waviness and Hybrid parameters are sets of parameters
found in the Recipe Editor for the recipe being used to create the 3D scan that is being
analyzed. For details on each parameter set, see Chapter 3. To cause these parameters
to be displayed in the
Surface Summary information, use the following procedure:
Left Side rotates the image so that the surface is in the same basic orientation as the
Original View, only with the front to the right, the rear of image to the left and the left
side to the front of the display.
Right Side rotates the image so that the surface is in the same basic orientation as the
Original View, only with the front to the left, the rear of image to the right and the right
side to the front of the display.
Table 7.11 Change Menu Option From the View Menu (Continued)
Menu Item Description of Action
Figure 7.15 Parameters Menu from the Analysis Screen Menu Bar