KLA Tencor P-16+ - Figure 3.22 Vertical Ranging - Profile Types; Table 3.20 Profile Types

Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
3-30 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Saturated Data Points If, in the course of a scan, the upper limit of any one of the ranges is reached, the
system aborts the scan and a message is issued reporting that there are too many
saturation data points. The scan appears as complete, however, the end of the
trace is only a continuation of the last data point, not actual scan data.
Profile Type: Available choices for each range and the resultant scan traces
Figure 3.22 Vertical Ranging - Profile Types
For the 131, 327, and 1000 μm
ranges, the three Profile Types allow
the user to choose features that go
up or down from the sample surface
the full range, or split the difference
between up and down features.
Table 3.20 Profile Types
Profile Type Range Description
131 μm
327 μm
1000 μm
131 μm scans features that are approximately 52 μm up or down from the scan’s starting
point.
327 μm scans features that are approximately 130 μm up or down from the scan’s
starting point.
1000 μm scans features that are approximately 400 μm up or down from the scan’s
starting point.
64 μm This scans features that are approximately 26 μm up or down from the scan’s starting
point.
26 μm This scans features that are approximately 10 μm up or down from the scan’s starting
point.
13 μm This scans features that are approximately 5 μm up or down from the scan’s starting
point.
6.5 μm This scans features that are approximately 2.5 μm up or down from the scan’s starting
point.
131 μm
327 μm
1000 μm
131 μm scans features ≈ 100 μm up from the scan’s starting point.
327
μm scans features ≈ 240 μm up from the scan’s starting point.
1000 μm scans features ≈ 750 μm up from the scan’s starting point.