KLA Tencor P-16+ - Stress Recipe Catalog; Stress Scan Data File Catalog; Creating a Stress Recipe; Number of Stress Points

Stress (Optional feature) - Creating a Stress Recipe KLA-Tencor P-16+ / P-6 User’s Guide
9-6 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Stress Recipe Catalog 9
This section describes the various parts of the Stress Recipe Catalog screen and the
function of the stress recipe related buttons.

Print Prints the list of recipes.

View/Modify Opens the Stress Recipe Editor for the currently highlighted
recipe.

Start Initiates a stress scan using the currently highlighted recipe.

Delete Deletes the currently highlighted recipe from the recipe list.
Stress Scan Data File Catalog 9
This section describes the various parts of the Stress Data Catalog screen and the
function of the data file related buttons.

Review Opens the Stress Analysis screen to view the data in the highlighted data
file.

Delete Deletes the currently highlighted stress data set.
 Calculation functions:

Set Pre Makes the currently highlighted data file the pre-stress scan.

Set Post Makes the currently highlighted data file the post-stress scan.
 After both pre- and post-stress data files are chosen, click the
Calculate
button to perform the stress calculation.
CREATING A STRESS RECIPE 9
Number of Stress Points 9
Ignore this number. This number was used with the Least Square Fit calculation
procedure. The calculations related to this procedure are described in the introduction
to this chapter. This number belongs to legacy software and has no effect on any
calculation.
Scan Start Position 9
This is the start position on the wafer X-, Y-coordinates. If the proper procedure was
used for wafer placement on the stress locator, this setting ensures that the pre- and
post-processing scans are performed at the same location on the wafer.
NOTE: The recipe used to collect the data must exist in the
stress recipe catalog. If it has been deleted, then the stress
cannot be calculated.
NOTE: If the wafer needs to be rotated, enter the XY View
screen, rotate the wafer, exit the XY View screen, then
enter new coordinates. If the system has a handler, it is
best to use the pre-aligner to load the wafer at the correct
angle.