Scan Recipes - Feature Find KLA-Tencor P-16+ / P-6 User’s Guide
3-90 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Example: Model Feature Search for the Edge of an Array of 5µm
Lines
3
♦ Four x scans are performed, lines one through four, from Bottom to Top,
to build a scan size equal to the number of lines as the model size.
♦ Since the model is not contained in the first four lines, additional lines
are collected until the seventh line is completed. At this point the Feature
Find scan is stopped since the model is contained in lines four through
seven.
♦ The x offset, plus the offset in the y direction for the model location from
scan center becomes the Feature Find offset for the measurement scan.
♦ In the scan in Figure 3.73, the center is (50
μm, 50 μm), and the feature is
found at (50
μm, 50 μm), so the offset from scan center is (0 μm, 0 μm).
Figure 3.73 Model Feature Scan
Model for the edge of the array
found on line 7
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