KLA Tencor P-16+ - Figure 3.23 Feature Detection - Recipe Editor

Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
3-32 KLA-Tencor Confidential 0142530-000 AB
3/13/09
Accessing the Feature Detection parameters: 3
In the Recipe Editor, click the Feature Detection button. (See Figure 3.23.) For
information on how to display the
Recipe Editor, see Accessing the Scan Recipe
Editor on page 13.
Figure 3.23 Feature Detection - Recipe Editor