KLA Tencor P-16+ - Accessing the Scan Recipe Editor; Recipe Editor for 2 D and 3 D Scans

0142530-000 AB KLA-Tencor Confidential 3-13
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Accessing the Scan Recipe Editor 3
The actual creation of a scan recipe is performed in the Editor screen. This means that
recipe creation and editing is restricted to those whose password permits access to the
Recipe Editor. Use the following procedure to access the Recipe Editor screen:
1. Open the Profiler Catalog screen. (See Table 3.10.)
2. Choose the
Scan Recipe button to display the Scan Recipe catalog.
3. Choose 2D or 3D scan recipes by clicking on the appropriate icon.
4. Click
New, located among the function buttons at the bottom of the Information
Display window. In the
Scan Recipe list, a recipe is highlighted in the list. This
has no effect on a
New recipe. The new recipe is generated using default
parameters.
5. Click
New, located among the function buttons at the bottom of the Information
Display window.
Recipe Editor for 2D and 3D Scans 3
Introduction 3
When New is clicked, the Recipe Editor appears with an UNTITLED recipe. (See
Figure 3.9.) The
UNTITLED recipe contains the default scan parameters. The Recipe
Editor
has eight windows for the 2D recipes and nine for the 3D recipes that, together,
contain all the variable scan recipe parameters. Each of these windows is accessed
through its own access button on the left side of the
Recipe Editor Screen. (See
Figure 3.9.) These windows are discussed one at a time, starting with the top button
and working down, until all the parameters required for defining a recipe are
explained.