0142530-000 AB KLA-Tencor Confidential 14-7
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Configuration - Stage Configuration
Theta Soft Home Position 14
The Soft Home position is set at manufacturing and should not require adjustment.
This procedure should only be attempted by a KLA-Tencor trained technician.
Teach Lowest Elevator Position 14
Introduction 14
The Lowest Elevator Position sets the vertical motion range of the stage. Using this
feature, a limit (Z coordinate) can be set for the elevator so that the measurement
head cannot descend past the level of the sample surface.
Correctly teaching the Lowest Elevator Position protects the measurement head when
the Proximity Sensor (which is used to switch from
Elevator Focus Speed to Elevator
Slow Focus Speed
) is not being used.
Figure 14.7 Stage Configuration Parameters
CAUTION: It is very important to reset the correct Lowest Elevator
Position after a precision locator is installed. The stylus can be
damaged if the stage remains configured to the original setting.
To Next Page
Loading...