KLA Tencor P-16+ - Figure 2.6 Contact Scan Stylus Tip

0142530-000 AB KLA-Tencor Confidential 2-9
Friday, March 13, 2009
KLA-Tencor P-16+ / P-6 User’s Guide Basic Skills - Protecting the Stylus Arm Assembly
Preliminary
 The stylus can be damaged by a shorter object if it has sharp corners or burrs
that bite into the stylus tip.
 If the stylus is lowered or a scan is started when the sample is not directly under
the stylus, damage to the stylus could occur.
This is most likely to happen when lowering the measurement head such that the
stylus drops into the center hole of a hard disk or misses the edge of the sample.
Then when the stage is moved, the stylus is damaged.
 If a sample or precision locator is changed without resetting the Lowest
Elevator Position, the head can lower onto the locator if the stylus misses the
locator surface.
Figure 2.6 Contact Scan Stylus Tip
Scan Direction
Damage can
occur with steps
higher than the
bevel height.
Bevel Height
Bevel Height is
440 µm (17 mil) for
MicroHead L-styli
CAUTION: Do not move the stage unless the stylus is well above the
sample surface.
CAUTION: Do not start a scan unless the stylus is directly over the
sample or damage to the stylus or head could occur.
NOTE: The stylus tip is located about 4 mm (165 mils) below the
measurement head.
CAUTION: If changing the sample or precision locator to a different
height, reset the Lowest Elevator Position. Otherwise, damage to the
stylus or the measurement head can occur.