0142530-000 AB KLA-Tencor Confidential 14-19
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Configuration - Precision Locators (P-16+ Only)
2. If no other changes are to be made in the Proximity Sensor Configuration dialog
box, click
OK to accept the configuration. (See Figure 14.18.)
PRECISION LOCATORS (P-16+ ONLY) 14
Various precision locators are available to provide for exact positioning of a sample
relative to a fixed reference point. See Precision Locators (P-16+ Only)
on page 14-19 and Precision Locators (P-16+ Only) on page 14-19 for graphic
representations of the available precision locators.
The stage table is removable so the precision locators can be bolted directly to the
stage. Disc locators bolt directly to the stage table.
Wafer Precision Locators 14
Installing the Precision Locator: 14
1. In the Catalog screen, choose Scan Recipe to display the scan recipes in the site
list area.
2. With a recipe highlighted, click the
XY icon in the tool bar to open the XY View
screen. The XY View screen opens.
3. Click
MAN LOAD to move the head up and bring the stage out to the stage door.
4. If the head does not move up during the
MAN LOAD procedure, click the ELEV
button as many times as necessary to move the head to a high enough position so
that contact with the stylus can be avoided when removing the stage table.
5. Open the door.
CAUTION: Nominally, the top surface of a standard precision locator
should be at the same level relative to the measurement head as the
top surface of the stage tabletop. Still, it is a good idea to confirm the
accuracy of the setting for Lowest Elevator Position when a precision
locator is installed. The stylus can be damaged if the existing settings
are incorrect. Refer to the procedures in Teach Lowest Elevator
Position on page 14-7 for details.
CAUTION: Do not open the door before moving the stage into
position or the system might shut down due to the safety interlock
activation on the stage door.
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