KLA Tencor P-16+ - Feature Detection (Only for 2 D Scans)

0142530-000 AB KLA-Tencor Confidential 3-31
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide Scan Recipes - Creating and Editing a Scan Recipe
Feature Detection (Only for 2D Scans) 3
Feature Detection is used to enable automatic detection of some common classes of
profile features (see Figure 3.24 and Figure 3.25). Feature detection makes it possible
to automatically and reliably set the position of the measurement and leveling cursors
relative to the rising and falling edge of a step-like feature or the apex of an arc-like
feature.
In conjunction with feature detection, both the location of the edge (or the apex of an
arc) and the step width can be calculated and displayed in the Analysis window for up
edge, up base, down edge, down base, and Bump. Convex, concave, and Model
Feature Detection do not support feature width calculations since they only detect one
point in the scan..
131 μm
327 μm
1000 μm
131 μm scans features ≈ 100 μm down from the scan’s starting point.
327 μm scans features ≈ 240 μm down from the scan’s starting point.
1000 μm scans features ≈ 750 μm down from the scan’s starting point.
Table 3.20 Profile Types (Continued)
Profile Type Range Description