Scan Recipes - Creating and Editing a Scan Recipe KLA-Tencor P-16+ / P-6 User’s Guide
3-16 KLA-Tencor Confidential 0142530-000 AB
3/13/09
2. Scan Speed (μm/s) - This parameter sets the speed at which the scan is
performed. It has a range between
1 μm/s and 25000 μm/s, with numerous
options within this range displayed in its drop-down menu and is not
user-definable.
3.
Sampling Rate (Hz) - is the frequency at which data points are collected. The
Sampling Rate sets the number of data points that are collected per second
during a scan. Figure 3.13 illustrates the impact of stylus radius in generating a
scan trace
NOTE: For short scans, 2mm and smaller, the general rule of thumb is
to keep the scan time between 5 and 10 seconds. This is shown in the
recipe and can also be determined by dividing the scan length by the
scan speed. This rule does not always apply, such as when using the 2
µm HAR stylus with a 50 µm/sec scan speed reccomended limit. This
rule also generally does not apply for long scans of the substrate,
typically performed for stress measurements.
CAUTION: When scanning soft material (e.g., copper, aluminum, and
photoresist) it might be required to reduce the applied force and scan
speed.
CAUTION: If the scan speed is set too fast when using a small
applied force, features might be missed or inaccurately traced.
NOTE: Optimal Sampling Rate is between 50 and 200 Hz.
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