Sequence Recipe and Data - Saving the Sequence Data KLA-Tencor P-16+ / P-6 User’s Guide
6-48 KLA-Tencor Confidential 0142530-000 AB
3/13/09
1. Click the Sequence menu, and select:
Save to save the current recipe, or
Save As to save the current recipe under a different name.
2. Type a sequence name in the
Name field.
The name can be upper or lower case. If using special characters, only the
following are allowed:
3. Click
OK.
SAVING THE SEQUENCE DATA 6
The Scan and Sequence Data sets can be saved and retrieved for future review and
additional reanalysis using different scan recipe parameters.
If a scan is completed without being interrupted, the Analysis screen automatically
appears after the scan is complete.
~ tilde ( left parenthesis
! exclamation point ) right parenthesis
@ at sign _ underscore
# number sign - hyphen
$ dollar sign { left brace
% percent sign } right brace
^ caret ‘ single quotation mark
& ampersand ' apostrophe
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