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300360490_002_C0 - 09/2016 - © Leybold
6 Technical Data
Measuring principle piezo-resistive
Measuring range 2000 - 1 mbar (1500 - 1 Torr)
Max. overload 5 bar abs.
Uncertainty
Reproducibility
0.25 % FS (linearity, hysteresis, reproducibility)
0.05 % FS
TC* Zero
TC* Sensitivity
0.1 % FS/10K
0.15 % FS/10K
Materials in contact with
media
stainl. steel 1.4305, Al
2
O
3
ceramic, FPM (DI2000, DU2000),
EPDM (DI2001, DU2001)
Operating temperature 0 … +60
C
Storage temperature -40...+70
C
Response time < 20 ms
Voltage supply DI: 12 – 30 VDC (two-wire)
DU: 14,5 - 30 VDC (four-wire)
Electrical connection DI: 5m cable with diode plug, 7pin, male
DU: 5m cable with plug type FCC68, 8pin
Output signal DI: 4 - 20 mA, linear
max. load in Ω: (supply voltage – 12V) / 0.02A
DU: 2 - 10 VDC, linear
Dead volume 1.8 cm
Vacuum connection small flange DN16 ISO KF
with G1/4 female thread
Protection class IP 54
Weight DI: 260 g
DU: 240 g
* Temperature coefficient