Original installation and operating instructions.
4 Operation 46
4.1 Before Starting 46
4.1.1 Pumping of monoatomic Gas 47
4.2 Stop Pump 48
4.3 Venting 48
4.4 Removing from Service 49
5 Maintenance 51
5.1 Leybold Service 51
5.2 Maintenance Intervals 51
5.3 Exchanging the Lubricant 53
5.4 Exhaust Piping Connector 54
5.5 Pump Inlet Flange 54
5.6 Purge Gas Pressure and Flow Regulator 55
5.7 Cooling Water Piping 55
5.8 Coolant Level 55
6 Troubleshooting 56
6.1 Pump Malfunctions 56
6.1.1 Malfunctions with CC-type Pumps 56
6.2 Malfunctions with Frequency Converter Operations (option) 56
7 Waste Disposal 59
EC Declaration of Conformity 60
Declaration of Contamination 61
Page
To Next Page
Loading...