5
Placement of the elements
Placement procedure for susceptors:
① Bottom plate
⑤ Upper susceptor
④ Side susceptor
(left)
②Bottom susceptor
①Bottom plate
③ Rear susceptor
④ Side susceptor
(right)
<Side viewl>
(O )
<Side view>
( X)
<Side view>
( X)
⑤
⑤
⑤
▪ Attention: the susceptors are very fragile parts. Please handle them carefully and avoid dropping or hitting them.
▪ Push the susceptors and plates until they come to a stop with the bottom.
▪ However, the upper susceptor (5) should be flush with the front of the chamber as in the views below:
Placement of objects and tray:
-Put the beads in the tray, level the surface and then place the
works on the beads.
-Be careful that there are no beads outside the tray.
-Position the indicator mark forwards to easily extract the tray
with the tool.
Front
part
1.Place the bottom plate (1)
2.Place the bottoom susceptor (2)
3.Place the second bottom plate (1)
4.Place the rear susceptor (3)
5.Place the side susceptors (4)
6.Place the upper susceptor (5)