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MKS elite 750 User Manual

MKS elite 750
55 pages
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OPERATIONMANUAL
Manual Order Number: 1036315 Copyright © 2009 MKS Instruments, Inc. All rights reserved.
Revision Level: 00A MATCHWORK
®
is a registered trademark of MKS Instruments, Inc.
elite
TM
RFPlasmaGenerator
elite300/600/750
WARNING: POTENTIALLY LETHAL VOLTAGES ARE USED BY AND PRODUCEDBY
THIS UNIT. A thorough understanding of this manual is required before
attemptingtoinstallthisunitintoasystem.
CFC's
DONOT USEANYCFC(CHLOROFLUOROCARBON)SOLVENTINTHEMAINTENANCEOFTHIS
PRODUCT. In recognition of our responsibility to protect the environment, thisproduct has
been manufactured without the use of CFCs. The noclean flux now used in all soldering
operations may leave a small inert residue that will not affect the performance of the
product.TheuseofCFCsforcleaningormaintenance mayresultinpartialliquificationofthe
nocleanfluxresidue,whichwilldamagetheunitandvoidthewarranty.
ISO 9001
QUALITY
SYSTEM
This product is manufactured at an MKS Instruments’ ISO9001QualitySystemcompliant
facility.
Notice
Thematerialcontainedinthismanualissubjecttochangewithoutnotice.Nopartofthismanualmaybereproduced
orutilizedinanyformorbyanymeans,electronicormechanical,includingphotocopyingorelectronictransmissionor
other means of reproduction or distribution without prior written consent of MKS, ENI Products. The drawings,
spec
ificationsandothertechnicalinformationcontainedinthismanualarethepropertyofMKS,ENIProductsandshall
notbecopied,reproducedorusedinanyway,inwholeorinpart,asthebasisofmanufactureorsaleofsimilaritems
withoutthepriorwrittenconsentofMKS,ENIProducts.

Table of Contents

Questions and Answers:

MKS elite 750 Specifications

General IconGeneral
BrandMKS
Modelelite 750
CategoryPortable Generator
LanguageEnglish

Summary

Warranty Information

Chapter 1 - Introduction

Safety Considerations

Essential safety precautions and hazard warnings to ensure safe operation and maintenance of the unit.

Chapter 2 - System Installation

Installation Requirements

Essential requirements for airflow, power, and upstream disconnect devices for proper installation.

Safety Interlocks

Explanation of the RF interlock system and how to satisfy it for safe operation.

Power Requirements

Specifications and connection details for the AC power supply needed for the generator.

Chapter 3 - Operation

Chapter 4 - Troubleshooting

Hardware Faults

Common hardware-related problems and their recommended solutions for the generator.

Appendix A - elite™ Specifications

Electrical Specifications

Comprehensive electrical characteristics including frequency, power, accuracy, and stability.

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