MKS elite 300 User Manual

OPERATIONMANUAL
Manual Order Number: 1036315 Copyright © 2009 MKS Instruments, Inc. All rights reserved.
Revision Level: 00A MATCHWORK
®
is a registered trademark of MKS Instruments, Inc.

elite
TM
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RFPlasmaGenerator
 elite300/600/750
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


WARNING: POTENTIALLY LETHAL VOLTAGES ARE USED BY AND PRODUCEDBY
THIS UNIT. A thorough understanding of this manual is required before
attemptingtoinstallthisunitintoasystem.

CFC's

DONOT USEANYCFC(CHLOROFLUOROCARBON)SOLVENTINTHEMAINTENANCEOFTHIS
PRODUCT. In recognition of our responsibility to protect the environment, thisproduct has
been manufactured without the use of CFCs. The no‐clean flux now used in all soldering
operations may leave a small inert residue that will not affect the performance of the
product.TheuseofCFCsforcleaningormaintenance mayresultinpartialliquificationofthe
no‐cleanfluxresidue,whichwilldamagetheunitandvoidthewarranty.
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ISO 9001
QUALITY
SYSTEM
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This product is manufactured at an MKS Instruments’ ISO‐9001‐Quality‐System‐compliant
facility.
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Notice
Thematerialcontainedinthismanualissubjecttochangewithoutnotice.Nopartofthismanualmaybereproduced
orutilizedinanyformorbyanymeans,electronicormechanical,includingphotocopyingorelectronictransmissionor
other means of reproduction or distribution without prior written consent of MKS, ENI Products. The drawings,
spec
ificationsandothertechnicalinformationcontainedinthismanualarethepropertyofMKS,ENIProductsandshall
notbecopied,reproducedorusedinanyway,inwholeorinpart,asthebasisofmanufactureorsaleofsimilaritems
withoutthepriorwrittenconsentofMKS,ENIProducts.

MKS elite 300 Specifications

General

Brand	MKS
Model	elite 300
Category	Portable Generator
Language	English