OPERATIONMANUAL
Manual Order Number: 1036315 Copyright © 2009 MKS Instruments, Inc. All rights reserved.
Revision Level: 00A MATCHWORK
®
is a registered trademark of MKS Instruments, Inc.
elite
TM
RFPlasmaGenerator
elite300/600/750
WARNING: POTENTIALLY LETHAL VOLTAGES ARE USED BY AND PRODUCEDBY
THIS UNIT. A thorough understanding of this manual is required before
attemptingtoinstallthisunitintoasystem.
CFC's
DONOT USEANYCFC(CHLOROFLUOROCARBON)SOLVENTINTHEMAINTENANCEOFTHIS
PRODUCT. In recognition of our responsibility to protect the environment, thisproduct has
been manufactured without the use of CFCs. The no‐clean flux now used in all soldering
operations may leave a small inert residue that will not affect the performance of the
product.TheuseofCFCsforcleaningormaintenance mayresultinpartialliquificationofthe
no‐cleanfluxresidue,whichwilldamagetheunitandvoidthewarranty.
ISO 9001
QUALITY
SYSTEM
This product is manufactured at an MKS Instruments’ ISO‐9001‐Quality‐System‐compliant
facility.
Notice
Thematerialcontainedinthismanualissubjecttochangewithoutnotice.Nopartofthismanualmaybereproduced
orutilizedinanyformorbyanymeans,electronicormechanical,includingphotocopyingorelectronictransmissionor
other means of reproduction or distribution without prior written consent of MKS, ENI Products. The drawings,
spec
ificationsandothertechnicalinformationcontainedinthismanualarethepropertyofMKS,ENIProductsandshall
notbecopied,reproducedorusedinanyway,inwholeorinpart,asthebasisofmanufactureorsaleofsimilaritems
withoutthepriorwrittenconsentofMKS,ENIProducts.