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MKS elite 300 User Manual

MKS elite 300
55 pages
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OPERATIONMANUAL
Manual Order Number: 1036315 Copyright © 2009 MKS Instruments, Inc. All rights reserved.
Revision Level: 00A MATCHWORK
®
is a registered trademark of MKS Instruments, Inc.
elite
TM
RFPlasmaGenerator
elite300/600/750
WARNING: POTENTIALLY LETHAL VOLTAGES ARE USED BY AND PRODUCEDBY
THIS UNIT. A thorough understanding of this manual is required before
attemptingtoinstallthisunitintoasystem.
CFC's
DONOT USEANYCFC(CHLOROFLUOROCARBON)SOLVENTINTHEMAINTENANCEOFTHIS
PRODUCT. In recognition of our responsibility to protect the environment, thisproduct has
been manufactured without the use of CFCs. The noclean flux now used in all soldering
operations may leave a small inert residue that will not affect the performance of the
product.TheuseofCFCsforcleaningormaintenance mayresultinpartialliquificationofthe
nocleanfluxresidue,whichwilldamagetheunitandvoidthewarranty.
ISO 9001
QUALITY
SYSTEM
This product is manufactured at an MKS Instruments’ ISO9001QualitySystemcompliant
facility.
Notice
Thematerialcontainedinthismanualissubjecttochangewithoutnotice.Nopartofthismanualmaybereproduced
orutilizedinanyformorbyanymeans,electronicormechanical,includingphotocopyingorelectronictransmissionor
other means of reproduction or distribution without prior written consent of MKS, ENI Products. The drawings,
spec
ificationsandothertechnicalinformationcontainedinthismanualarethepropertyofMKS,ENIProductsandshall
notbecopied,reproducedorusedinanyway,inwholeorinpart,asthebasisofmanufactureorsaleofsimilaritems
withoutthepriorwrittenconsentofMKS,ENIProducts.

Table of Contents

Questions and Answers:

MKS elite 300 Specifications

General IconGeneral
BrandMKS
Modelelite 300
CategoryPortable Generator
LanguageEnglish

Summary

Introduction

About This Manual

Provides an overview of the manual's content, structure, and documentation conventions used.

Safety Considerations

Covers essential safety information, hazard symbols, and precautions for operating the generator.

Getting Started Quickly

Offers a concise, step-by-step guide for initial setup and basic operation of the generator.

System Installation

Unpacking and Inspection

Details the procedures for receiving, inspecting, and preparing the generator for installation.

Installation Requirements

Specifies airflow, ventilation, power supply, and environmental requirements for proper installation.

Rack Installation

Provides instructions for mechanically mounting the generator into a standard 19-inch rack.

Panels and Controls

Describes the front and rear panel layout, including connectors, indicators, and controls.

Operation

Basic Operation via RS-232 Interface

Explains how to control and monitor the generator using serial commands and a terminal program.

Operation through Optional Interfaces

Details using analog, digital, and other optional interfaces for generator control and monitoring.

Pulsed Operation

Covers configuration and operation of the generator's pulsed output mode.

Troubleshooting

Hardware Faults

Lists common hardware issues, their possible causes, and recommended solutions for the generator.

elite™ Specifications (Appendix A)

Frequency and Power Specifications

Details key electrical specifications including frequency, power output, accuracy, and stability.

Interface and Physical Specifications

Covers physical dimensions, weight, connectors, and internal fuse ratings.

Glossary of Terms (Appendix B)

Glossary of Technical Terms

Defines technical terms and acronyms used throughout the operation manual.

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