6 Electromagnetic Inductive RFID System V640 for Semiconductor Industry
Applicable SEMI Standards
■ CIDRW System Conforming to SEMI Standards
The Carrier ID Reader Writer (CIDRW) System is an RFID system that conforms to SEMI standards. The V700-L22 CIDRW Controller, the V640-
HAM1@ Amplifier Unit, the V640-HS6@ CIDRW Head, and a Texas Instruments ID Tag can be used to configure a Carrier ID Reader Writer (CI-
DRW) System that conforms to the following standards:
• SEMI E99 CARRIER ID READER/WRITER FUNCTIONAL STANDARD
• SEMI E5 EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)
• SEMI E4 EQUIPMENT COMMUNICATIONS STANDARD 1 MESSAGE TRANSFER (SEC- I)
Note: SEMI: Semiconductor Equipment and Materials International (Refer to SEMI for standards information. (SEMI URL: http//:www.semi.org/))
SECS: SEMI Equipment Communications Standard
Refer to the User’s Manual (V640-HAM11-V2: Cat. No. Z167; V640-HAM12: Cat. No. Z218) for details.
V700-L22 conforms to SEMI E99-0303 (issued in March 2003).
* The following table lists the ID Tags (manufactured by Texas Instru-
ments) that can be read/written by the V640 RFID System.
Host device
SECS I/II
V700-L22 CIDRW Controller
V640-HAM1@ Amplifier Unit
CIDRW System Conforming to SEMI Standards
V640-HS6@ CIDRW Head ID Tag*
(Texas Instruments)
RS-232C
RS-232C
Amplifier Unit CIDRW Head ID Tag (Texas
Instruments)
V640-HAM11-V2 V640-HS61 RI-TRP-DR2B
RI-TRP-WR2B
V640-HAM12 V640-HS62
V640.fm Page 6 Wednesday, September 13, 2006 4:21 PM
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