GB 02862 - Edition 04 - April 12
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A3-P Series dry pumps
Welcome
Applications
P version : for light and medium process.
Feature
Compact design.
Low noise level.
Low vibration level.
Robust and established technology.
High pumping speed (equivalent to pump and blower), in a compact
design.
Advanced monitoring functions.
Benefits
Easy to integrate.
Clean room compatibility.
Highest reliability.
Low operating cost.
Failure of circuit protection.
Special feature
Standby purge (option).
Standby power / high speed option.
Semi S2-0706 standard compatible (option).
Dear Customer,
You have just purchased an
Adixen dry pump. We thank
you and are proud to include
you as one of our customers.
This product has benefited
from adixen Vacuum
Products’s many years of
experience in semiconductor
processes and dry pumping.
For optimum performance
and to obtain full satisfaction
from this equipment, we
recommend that you study
this operating manual before
any intervention on your
pump, in particular, the
chapter on installation and
start up.
adixen Vacuum Products - Operating instructions - A3P Series
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