GB 02865 - Edition 02 - November 07
1/2
A 10
Operating principle
Designed to minimize
by-product deposition
The equipment is designed to minimize potential by-product
deposition:
By limiting the internal volumes containing gas.
By injecting N
2
purge on each pump stage to dilute the process
gas.
By regulating the pump temperature to limit gas condensation.
By integrating the silencer inside the pump body to reduce by-
product deposition.
Multi-stage roots
principle
A3-P Range pump functional block consists of 6 Roots type pumping
stages.
The two rotors rotate without touching each other.
%XHAUSTSTAGE 4RANSFERSTAGE 4RANSFERSTAGE 4RANSFERSTAGE
%XHAUST
4RANSFERSTAGE )NLETSTAGE
)NLET
Tightness with
environment
The pump is fitted with ball bearings lubricated with fluorinated
grease.
An overpressure zone is created around the bearing by injecting a
neutral gas.
The pressurization and the seals prevent pumped gases and powders
from migrating towards the bearings.
Neutral gas purging of the bearings is imperative.
Tightness at low pressure
side
Tightness at high pressure
side
The bearings are lubricated by oil splashing.
The tightness is achieved with a deflector and a seal.
adixen Vacuum Products - Operating instructions - A3P Series
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