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ASM 340 D
Pfeiffer Vacuum ASM 340 D - User Manual
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MAINTENANCE INSTRUCTIONS
EN
Translation of the Original
ASM 340
Leak detector
2
Table of Contents
Main Page
Table of Contents
3
About this Manual
5
Validity
5
Applicable Documents
5
Products Concerned
5
User Target Group
5
Conventions
5
Instructions in the Text
5
Pictographs
6
Labels
6
Safety
9
General Safety Information
9
Safety Instructions
9
Precautions
11
General Information
12
Spare Parts
12
Preparatory Work
12
Maintenance Frequency and Responsibilities
13
Service - Maintenance
15
Cleaning
15
Detector Powering off
15
Air Inlet before a Maintenance Operation
15
Front Cover Disassembly/Reassembly
15
Rear Cover Disassembly/Reassembly
16
Front Cover Replacement
17
Internal Calibrated Leak Replacement
19
Analyzer Cell Maintenance
20
Analyzer Cell Disassembly/Reassembly
20
Seal Replacement
22
Filament Replacement
22
Backing Pump Maintenance (Wet Model)
23
Oil Level Checking
23
Oil Quality Checking
23
Draining the Pump
24
Flushing the Pump
24
Filling the Pump
26
Internal Oil Mist Separator Replacement
27
Maintenance of the Turbomolecular Pump
29
1Access to the Turbomolecular Pump Operating Fluid Reservoir
29
2Turbomolecular Pump Operating Fluid Reservoir Replacement
29
Fan Maintenance
32
1Air Inlet Fan Replacement
32
2Turbomolecular Pump Fan Replacement
35
3Exhaust Fan Replacement
36
Filter Maintenance
37
1Cover Air Filters Replacement
37
2Vacuum Block Air Filter Replacement
37
Pirani Gauge Replacement
38
Decommissioning
39
Shutting down for Longer Periods
39
Disposal
39
Restriction of Hazardous Substances (Rohs)
39
Electrical and Electronic Equipment (EEE)
39
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Pfeiffer Vacuum ASM 340 D Specifications
General
Brand
Pfeiffer Vacuum
Model
ASM 340 D
Category
Security Sensors
Language
English
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