Table of contents
1 About this manual 5
1.1 Validity 5
1.1.1 Applicable documents 5
1.1.2 Products concerned 5
1.2 User target group 5
1.3 Conventions 5
1.3.1 Instructions in the text 5
1.3.2 Pictographs 6
1.3.3 Labels 6
2 Safety 9
2.1 General safety information 9
2.1.1 Safety instructions 9
2.1.2 Precautions 11
3 General information 12
3.1 Spare parts 12
3.2 Preparatory work 12
4 Maintenance frequency and responsibilities 13
5 Service - Maintenance 15
5.1 Cleaning 15
5.2 Detector powering off 15
5.3 Air inlet before a maintenance operation 15
5.4 Front cover disassembly/reassembly 15
5.5 Rear cover disassembly/Reassembly 16
5.6 Front cover replacement 17
5.7 Internal calibrated leak replacement 19
5.8 Analyzer cell maintenance 20
5.8.1 Analyzer cell disassembly/reassembly 20
5.8.2 Seal replacement 22
5.8.3 Filament replacement 22
5.9 Backing pump maintenance (Wet Model) 23
5.9.1 Oil level checking 23
5.9.2 Oil quality checking 23
5.9.3 Draining the pump 24
5.9.4 Flushing the pump 24
5.9.5 Filling the pump 26
5.9.6 Internal oil mist separator replacement 27
5.10 Maintenance of the turbomolecular pump 29
5.10.1Access to the turbomolecular pump operating fluid reservoir 29
5.10.2Turbomolecular pump operating fluid reservoir replacement 29
5.11 Fan maintenance 32
5.11.1Air inlet fan replacement 32
5.11.2Turbomolecular pump fan replacement 35
5.11.3Exhaust fan replacement 36
5.12 Filter maintenance 37
5.12.1Cover air filters replacement 37
5.12.2Vacuum block air filter replacement 37
5.13 Pirani gauge replacement 38
6 Decommissioning 39
6.1 Shutting down for longer periods 39
6.2 Disposal 39
6.2.1 Restriction of Hazardous Substances (RoHS) 39
6.2.2 Electrical and Electronic Equipment (EEE) 39
Table of contents
3/50
To Next Page
