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TMH 521 P
Pfeiffer Vacuum TMH 521 P User Manual
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T
urbomolecular Drag Pumps
With Electronic Drive Unit TC 600
PM
0496 BE/K (0503)
TMH 521 P
TMU 521 P
Betr
iebsanleit
ung • Oper
ating Instr
uctions
2
Table of Contents
Default Chapter
2
Table of Contents
2
1 Safety Instructions
3
For Your Orientation
3
Pictogram Definitions
3
2 Understanding the Pumps TMH 521 P/TMU 521 P
4
Main Features
4
Proper Use
4
Improper Use
5
Differences between the Pump Types
5
Scope of Delivery
5
3 Installation
6
Preparations for Installation
6
Installing the Pump, Connecting the High Vacuum Side
6
Connecting the Fore-Vacuum Side
9
Connecting the Cooling Unit
10
Connecting the Venting Valve
10
Connecting the Casing Heating Unit
10
Connecting the Sealing Gas Valve
10
Connecting the Electronic Drive Unit TC 600
11
Installing the Power Supply
11
Connecting the Remote Control Unit
12
Connecting the Serial Interface RS 485
13
Connection
13
Connecting the RS 485
13
Connections Diagram
14
4 Operations
15
Before Switching on
15
Switching on
15
Switching off and Venting
15
Gas Type Dependent Operations
16
Shutting down for Longer Periods
16
Operations with the DCU 001, DCU 300
17
Or HPU 001
17
Operations with the Remote Control Unit
17
Venting Release (Optional)
17
Motor, Turbopump
17
Pumping Station
17
Heating/Reset
17
Standby
17
Rotation Speed Setting Mode Via Input PWM
18
Switching Outputs
18
5 Monitoring Operations
19
Operations Display Via LED
19
Turbopump Temperature Management
19
6 What to Do in Case of Breakdowns
20
7 Maintenance/Replacement
21
Replacing the Lubricant Reservoir
21
Replacing the Electronic Drive Unit TC 600
22
8 Service
23
9 Technical Data
24
Dimensions Diagram
25
10 Spare Parts
28
11 Accessories
29
Declaration of Contamination
30
Manufacturer's Declaration
31
4
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Pfeiffer Vacuum TMH 521 P Specifications
General
Ultimate pressure
5 x 10^-9 mbar
Operating voltage
24 V DC
Weight
1.5 kg
Voltage
24 V DC
Outlet flange
DN 16 ISO-KF
Cooling method
Air
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