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TPU 2101 P
Pfeiffer Vacuum TPU 2101 P User Manual
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T
urbomolecular Pumps
With Electr
onic Dr
iv
e Units TC 750
PT 0041 BE/N (0703)
TPH 21
0
1 P /
PC
TPU 21
0
1 P
/
PC
Betr
iebsanleitung • Oper
ating Instr
uctions
2
Table of Contents
Table of Contents
2
Safety Instructions
3
For Your Orientation
3
Pictogram Definitions
3
Understanding the Pumps
4
Main Features
4
Proper Use
4
Improper Use
5
Differences between the Pump Types
5
Scope of Delivery
5
Installation
6
Preparations for Installation
6
Connecting the High Vacuum Side
6
Connecting the Fore-Vacuum Side
8
Connecting the Cooling Unit
9
Connecting the Casing Heating Unit
9
Connecting the Electronic Drive Unit TC 750
10
Installing the Power Unit
10
Installing the Cover Plate for the TC 750
11
Connecting the Venting Valve
12
Connecting the Sealing Gas Valve
12
Connecting the Remote Control Unit
13
Connecting the Serial Interface RS 485
14
Connection
14
Connecting the RS 485
14
Connections Diagram
15
Operations
16
Filling in the Lubricant
16
Before Switching on
16
Switching on
17
Gas Type Dependent Operations
17
Circulatory Lubrication
18
Switching off and Venting
18
Shutting down for Longer Periods
18
Operations with the DCU 001/DCU 600 or HPU 001
18
Operations with the Remote Control Unit
19
Venting Release (Optional)
19
Motor, Turbopump
19
Pumping Station
19
Heating/Reset
19
Standby
19
Rotation Speed Setting Operations Via Input PWM
19
Switching Outputs
19
Monitoring Operations
20
Operations Display Via LED
20
Turbopump Temperature Monitoring
20
What to Do in Case of Breakdowns
21
Service
22
Maintenance/Replacement
23
Replacing the Lubricant
23
Cleaning the Lubricating Pump
24
Replacing the Lubricating Pump
24
Replacing the Electronic Drive Unit TC 750
24
Technical Data
25
Dimensions Diagram
26
Spare Parts
27
Accessories
28
Lubricant
28
Declaration of Contamination
29
Manufacturer´s Declaration
31
4
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Pfeiffer Vacuum TPU 2101 P Specifications
General
Brand
Pfeiffer Vacuum
Model
TPU 2101 P
Category
Water Pump
Language
English
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