POWATEC P-200 - Wafer Mounting on Chuck; UV Tape Application and Rolling

EPFLCenterofMicroNanoTechnology
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CMi/WafermountingwithPOWATECP‐200andU‐200    Page2/6
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3‐ Forwafermounting:
placeyourwaferonthevacuumchuck.Thesidetobegroundlateris
facingdown.Thenactivatethevacuum. Usingthescrewnutlocatedbelowthechuck,adjust
theheightofthewafersoitisonthesamelevelastheframe.Usethemanualrollingpad to
checkvisually.
Forchipsmounting:
lowerthechuckheightasmuchaspossible.Thechipswillbeplaced
manuallyonthetape,onlyafterthislatestisfullystuckontheframesandcut(i.e.laststep
ofthepresentprocedure).
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4‐ Usingbothhands,pull ontheextremityoftheUVtapeto
releaseitfromtheroll.Keep
pullinguntilpassingoverthefullframeandbeingabletostickittotheotherendofthe
system.
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Placeyourwafer
Activatethevacuum
Adjusttheheight Checkvisually
Adapterfor6’’frames
Pullthetape
Stickittotheblackbar