EPFLCenterofMicroNanoTechnology
CMi/WafermountingwithPOWATECP‐200andU‐200 Page1/6
WafermountingwithPOWATECP‐200andU‐200
WafermounterP‐200
TheP‐200fromPowatecisamanualwafermounterfittedwithdedicatedframes,cutterdevicesand
padrollerenablingbubblefreemountedwafersorchipsontoUV‐sensitivetape.Todothis,proceed
asfollows:
1‐ Makesurethemachineispluggedin.Agreensquarelightshouldbe
visiblethroughthelid.
ThisenablescorrectfunctioningofthemotordrivenUV‐taperollers.
2‐ Placeaframe,adjustingitspositionwiththe4alignmentscrewspresentonthesystem.
Smallmagnetsensurefirmnessofsteelframes.
Note:
ifusing6’’frames(!!notusablewiththegrinder!!),asizeadapteristobeplacedfirst.
Greenlight
Plugthemachinein
Adapterfor6’’frames