EPFLCenterofMicroNanoTechnology
CMi/WafermountingwithPOWATECP‐200andU‐200 Page4/6
8‐ Turnthevacuumoffandgetyourframereadyforgrinding.
9‐ Onlyforchipsmounting:
manuallystickthechipsonthetape(si detobegroundfacingup!).
Anylocationontheavailabletapeareaisusable.
Stopthevacuum
Gettheframe