Rigaku Smartlab SE - Wafer Sample Plates

Sample Plate
Table Wafer sample plates
Name
Illustration
4-inch wafer sample plate
~ I
( optional: 2680A304)
'·
6-inch wafer sample plate
!-.. .,.
\-.~ I
( optional: 2680A302)
~
8-inch wafer sample plate
(~
( optional: 2680A303)
~
4-inch XY mapping sample plate
~
(included with XY-4 inch ¢
attachment head)
Table List of possible combinations of attachment head, sample spacer, and
sample plate
Attachment head Sample spacer
Sample plate
Measurable
sample thickness
Standard
attachment head
RxRy
attachment head
XY -20 mm
attachment head
XY-4 inch¢
attachment head
0-3mm
4-inch wafer sample plate
3 -12mm 6-inch wafer sample
0-3 mm
12-21 mm plate(* 1)
3-12 mm
(black stamped
8-inch wafer sample 12-21 mm
mark)
plate(* 1)
4-inch wafer sample plate
6-in ch wafer sample plate(* 1)
21 -30 mm
8-inch wafer sample plate(* 1)
0-9mm
4-inch XY mapping
(blue stamped
0- 9mm
mark)(*2)
sample plate
4-inch XY mapping sample plate
9-18 mm
* I Both X and Y must be O mm when a sample is placed on tbe XY-20 nun attachment head.
*2 When tbe XY-4 inch
¢ attachment head is used, tbe thickness indicated by the blue stamped mark
on the sample spacer is availabl
e.
94 SmartLab SE : Automated Multipurpose X- ray Diffractometer