1. APPLICATION & FEATURES…………….
5.2.2 Zero Test and Adjustment…………………..
2. SPECIFICATION…………………………..
5.2.3 Gas Supply………………………………….
3. STRUCTURE & PRINCIPLE……………...
5.2.4 Shut Off…………………………………….
3.1 Structure…………………………………….
3.2 Operation Principle…………………………
6.1 Medium Forbidden …………………………...
4. INSTALLATION & CONNECTION ……..
6.2 Corrosive Gas ………………………………..
4.1 Dimension…………………………………..
6.3 Valves Dynamic Sealing ……………………..
4.2 Fittings………………………………………
6.4 Valves Operating …………………………….
4.3 Electrical Interfacing………………………..
6.5 Installation Position ……………….................
4.4 PC Connection………………………………
6.6 Operation Pressure Resistance……………….
4.5 Zero Adjustment…………………………….
6.7 Calibration and Conversion…………………..
5. OPERATION INSTRUCTIONS…………..
6.8 D07-60B, 60BM Ordering Code….. …………
5.1 MFC Operation……………………………..
7. TROUBLESHOOTING……………………..
5.1.1 Start Up……………………………………
8. WARRANTY & SERVICE…………………..
5.1.2 Purge………………………………………
8.1 Product Warranty……………………………..
5.1.3 Readout Box & PC Connection…………...
8.2 Specific warranty requirements ………………
5.1.4 PC Connection…………………………….
8.3 Service…………………..……………………
5.1.5 Valves Control…………………………….
9. APPENDIX…………………………….…….
5.1.6 Shut Off Operation………………………..
9.1 Mass Flow Conversion factors…………….....
5.2 MFM Operation……………………………..
9.2 Conversion factors Introduction.......................
5.2.1 Start Up …………………………………..
MASS FLOW CONTROLLER & MASS FLOW METER