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Operating Instruction
1. APPLICATION & FEATURES
Mass Flow Meter (MFM) accurately measures mass flow rates, Mass Flow Controller (MFC) accurately measures
and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes. They are
widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry,
petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc. The
typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma
etching, sputtering, ion implantation; vacuum deposition equipment, optical fiber melting, micro-reaction equipment,
mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.
D07 series MFM & MFC bring the high accuracy, excellent repeatability, quick response, soft-start, better reliability,
wide variety ranges of operation pressure (good operation in high pressure and vacuum situations), simple
convenient operation, flexible installation, possible connecting with PC to carry out automatic control to the users’
system.
D07-60B、D07-60BM all use ±15 VDC power supply, and they are better connected together with D08 series
Readout Box, the cable connection is showing as following (Figure 1):
Figure 1 D07-60B MFC and Readout Box
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