Shimadzu EI-D1003M User Manual

263-13228I
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Power Supply Unit for Turbo Molecular Pump
Model:EI-D1003M
Model:EI-D1103M
Model:EI-D1303M
Model:EI-D2003M
Model:EI-D2203M
Model:EI-D2303M
Model:EI-D3203M
Model:EI-D3403M
Model:EI-D4203M
INSTRUCTION MANUAL

Shimadzu EI-D1003M Specifications

General

Brand	Shimadzu
Model	EI-D1003M
Category	Power Supply
Language	English

Summary

Introduction

Copyrights and Disclaimers

Details the copyright and disclaimer information for the manual.

SECTION 1 OUTLINE AND DESCRIPTIONS

1.1 Outline

Provides a general overview of the turbo molecular pump and its components.

1.2 Descriptions

Details the power supply unit, control cable, motor cable, and accessories.

1.2.1 Power Supply Unit

Describes the power supply unit, including dimensions and model numbers.

1.2.2 Control Cable

Lists available control cable options and their specifications.

1.2.3 Motor Cable

Lists available motor cable options and their specifications.

1.2.4 Standard Accessories

Lists the standard accessories included with the product.

SECTION 2 IDENTIFICATION AND FUNCTION

2.1 Power Supply Unit

Identifies and explains the functions of the power supply unit's front and rear panels.

SECTION 3 CONSTRUCTION AND PRINCIPLE

3.1 Power Supply Unit

Explains the construction and operating principles of the power supply unit.

SECTION 4 SPECIFICATIONS

4.1 Power Supply Unit

Details technical specifications of the power supply unit models.

4.2 Standards Fulfilled

Lists the safety and EMC standards that the product complies with.

SECTION 5 INSTALLATION

5.1 Installation of the Power Supply Unit

Covers location, mounting, and compatibility for installing the power supply unit.

5.1.1 Location of the Power Supply Unit

Guidelines for selecting an appropriate installation location for the unit.

5.1.2 Installation of the Power Supply Unit

Instructions on how to mount the power supply unit into a rack.

5.1.3 Compatibility with Previous Models

Information on replacing older models with the current power supply unit.

5.2 Connection of Power Cable

Step-by-step instructions for connecting the power cable correctly.

5.3 Connection of the Pump to the Power Supply Unit

Details how to connect the pump to the power supply unit using cables.

SECTION 6 OPERATION

6.1 Outline

Provides an overview of operating the turbo molecular pump system.

6.2 Start-up Preparation

Steps required before starting the pump in LOCAL or REMOTE mode.

6.3 Start-up

Procedures for starting the pump in LOCAL and REMOTE modes.

6.4 Shutting Down

Instructions for safely shutting down the turbo molecular pump.

6.5 Variable Speed Operation

Details on how to operate the pump at variable speeds.

6.6 Software Operation

Explains the functions available through the unit's software interface.

6.7 Remote-Control Connector

Specifications and compatibility for connecting external control systems.

SECTION 7 TROUBLESHOOTING

7.1 Nothing Happens After an Operation is Made

Addresses issues where the pump does not respond to commands.

7.2 Power Failures

Discusses behavior during power interruptions and regenerative braking.

7.3 Vacuum Pressure Rise

Explains causes and effects of rapid vacuum pressure increases.

7.4 Abnormal Noise and/or Vibration

Guidance on handling unexpected noise or vibrations from the pump.

7.5 Alarm Detection Capabilities

Details how the system detects and reports alarms and warnings.

Appendix A COMMUNICATIONS

A1. GENERAL SPECIFICATION

Overview of serial interface capabilities (RS-232C, RS-485) for computer connection.

A2. INTERFACE SPECIFICATION

Detailed specifications for RS-232C and RS-485 interfaces.

A2.1 RS-232C

Transmission specifications, connector type, and pin assignments for RS-232C.

A2.2 RS-485

Transmission specifications, connector type, and pin assignments for RS-485.

A3. POWER SUPPLY TO COMPUTER CONNECTION

Instructions on connecting the power supply to a computer via serial interfaces.

A4. SERIAL COMMUNICATIONS PROTOCOL

Defines the command structure, timeouts, and checksum for communication.

A4.1 Basic Message Structure

Defines the basic structure of commands and answers.

A4.2 Character to Character Time-out: 0.1 sec.

Specifies the time-out for character transmission delays.

A4.3 Command to Answer Time-out: 1 sec.

Specifies the time-out for command to answer delays.

A4.4 Power Supply Command Send Retry Cycles: 5

Defines the number of times commands will be retried.

A4.5 Command Transmission Specification

Details the specifications for transmitting commands.

A4.6 Receiving Sequence

Describes the sequence for receiving data strings.

A4.7 Using the Checksum Byte

Explains the use of checksums for data integrity.

A4.8 Outline of Multi-drop Communications

Details communication for multiple units connected via RS-485.

A5. TABLE OF COMMANDS

Lists all available commands and their corresponding character strings.

A6. COMMAND DESCRIPTION

Detailed explanation of each command and its operation mode.

A6.1 Operation Mode

Explains how to check and change the operational mode via commands.

A6.2 Operation

Details commands for starting, stopping, and resetting the pump.

A6.3 Run Status

Explains commands to check the pump's current operational status.

A6.4 Parameters

Commands for reading and sending various operational parameters.

A6.5 Events

Commands for handling system events like failures and status changes.

A6.6 Timer

Commands for managing timers related to operation and maintenance.

A6.7 History

Commands for reading historical data, such as alarm logs.

A6.8 Settings

Commands for reading and writing system settings.

A6.9 Shared Answer

Describes how the system provides shared answers to commands.

A7. RS-232C COMMANDS / ANSWERS

Examples of RS-232C commands and their corresponding answers.

A8. RELATION OF LOCAL MODE TO REMOTE MODE OPERATIONS

Explains how local and remote modes interact and affect operations.

A9. TROUBLESHOOTING

Troubleshooting tips for communication issues with the serial interfaces.