Shimadzu EI-D1003M User Manual

Name: Shimadzu EI-D1003M
Brand: Shimadzu
Rating: 4 (1 reviews)

123 pages

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Semiconductor Equipment Division

Power Supply Unit for Turbo Molecular Pump

Model:EI-D1003M

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Model:EI-D2003M

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Model:EI-D3203M

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Model:EI-D4203M

INSTRUCTION MANUAL

Introduction2
Copyrights and Disclaimers2
Precautions for Safe Operation3
Explanation of Label5
Location of Label5
Installation Precautions6
Part Replacement7
Conditional Warranty7
Scope of the Warranty7
Warranty of Repaired or Replacement Parts7
Exemption from the Warranty7
Disposal of Products and Parts8
Limitation of Liability8
Table of Contents10
Table of Contents11
Section 1 OUTLINE and DESCRIPTIONS14
Outline14
- Control Cable14
- Motor Cable14
- Standard Accessories14
Section 2 IDENTIFICATION and FUNCTION20
Power Supply Unit25
Power Supply Unit27
Standards Fulfilled29
Installation of the Power Supply Unit31
- Location of the Power Supply Unit31
- Compatibility with Previous Models34
Connection of Power Cable36
Connection of the Pump to the Power Supply Unit37
Outline40
- Introduction40
- Operation Flowchart40
Start-Up Preparation48
- Start-Up Preparation Sequence in LOCAL Mode48
- Start-Up Preparation Sequence in REMOTE Mode48
Start-Up49
- Start-Up Sequence in LOCAL Mode49
- Start-Up Sequence in REMOTE Mode49
Shutting down50
- Preparations Prior to Shutting down Operation50
- Shutting down Sequence in LOCAL Mode50
- Shutting down Sequence in REMOTE Mode51
Variable Speed Operation52
- Outline52
- Operation from Start-Up to Low Speed Rotation53
- Operation from Rated Speed Rotation to Low Speed Rotation54
- Operation from Low Speed Rotation to Rated Speed Rotation54
Software Operation56
Remote-Control Connector71
- Specifications71
- Compatibility with Previous Models73
  - Replacing the EI-Xx03M/MD Power Supply Unit73
  - Replacing EI-Xx03Mz Power Supply Units75
Section 7 TROUBLESHOOTING79
Nothing Happens after an Operation Is Made79
Power Failures80
- Power Failure Counter-Operation81
Vacuum Pressure Rise82
Abnormal Noise And/Or Vibration82
Alarm Detection Capabilities82
- Movement in Alarm Detection Capabilities (ALARM)82
- Movement in Alarm Detection Capabilities (WARNING)83
- Reset Procedure83
Appendix A COMMUNICATIONS92
General Specification93
Interface Specification94
- Rs-232C94
- Communication Cable Connection98
- Serial Communications Baud Rate Configuration98
- Multi-Drop Settings98
Serial Communications Protocol99
- Command to Answer Time-Out: 1 Sec100
- Command Transmission Specification100
- Receiving Sequence100
- Using the Checksum Byte100
- Outline of Multi-Drop Communications101
Table of Commands102
Command Description108
- Operation Mode108
- Operation109
- Run Status110
- Parameters111
Relation of Local Mode to Remote Mode117
Operations117
Troubleshooting118
- No Message Can Transmit and Receive118
  - Invalid118
  - CHECKSUM Error118

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Shimadzu EI-D1003M Specifications

General

Brand	Shimadzu
Model	EI-D1003M
Category	Power Supply
Language	English

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Table of Contents

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