EasyManua.ls Logo

Shimadzu EI-D3403M - User Manual

Shimadzu EI-D3403M
123 pages
Print Icon
To Next Page IconTo Next Page
To Next Page IconTo Next Page
Loading...
263-13228I
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Power Supply Unit for Turbo Molecular Pump
Model:EI-D1003M
Model:EI-D1103M
Model:EI-D1303M
Model:EI-D2003M
Model:EI-D2203M
Model:EI-D2303M
Model:EI-D3203M
Model:EI-D3403M
Model:EI-D4203M
INSTRUCTION MANUAL

Table of Contents

Questions and Answers

  • G
    gnicholsAug 9, 2025
    Why is my Shimadzu EI-D3403M Power Supply not turning on?
    • A
      Angela SimpsonAug 9, 2025
      The Shimadzu Power Supply might not be turning on due to several reasons: * The electrical power cable may not be properly connected. Ensure it is securely connected. * The electrical power may be outside the power supply unit’s range. Operate within the specified power range. * A fuse (F1, F2) might be blown. Replace the blown fuse. * The POWER switch may be faulty. In this case, replace the POWER switch and consult the nearest Shimadzu service company.
  • P
    Phillip BauerAug 15, 2025
    What to do if Shimadzu EI-D3403M turbo molecular pump does not accelerate after pressing START?
    • E
      Eric LongAug 15, 2025
      If the turbo molecular pump does not accelerate after pressing the START switch on your Shimadzu Power Supply, it could be due to the REMOTE/LOCAL selection switch being in the REMOTE position. Set the REMOTE/LOCAL selection switch to the LOCAL position. Also, check if the power supply unit’s ALARM lamp is ON. If an alarm is indicated, correct the malfunction and reset the power supply unit.
  • T
    Tamara JacksonAug 21, 2025
    What to do if remote START signal is active but the Shimadzu EI-D3403M Power Supply turbo molecular pump does not accelerate?
    • C
      Cassandra BradyAug 21, 2025
      If the turbo molecular pump does not accelerate when the remote START signal is active on your Shimadzu Power Supply, ensure that the REMOTE/LOCAL selection switch is in the REMOTE position. Also, verify that the STOP signal is not active; if it is, deactivate it. Finally, check if the unit’s ALARM lamp is ON. If an alarm is indicated, correct the malfunction and reset the power supply unit.
  • D
    Dr. Anita Proctor DDSAug 27, 2025
    What to do if Shimadzu EI-D3403M Power Supply turbo molecular pump does not decelerate after pressing STOP?
    • G
      Gabriella CarrollAug 27, 2025
      If the turbo molecular pump does not decelerate after pressing the STOP switch on your Shimadzu Power Supply, the REMOTE/LOCAL selection switch might be in the REMOTE position. Set the selection switch to the LOCAL position.
  • J
    James WilsonSep 2, 2025
    What to do if remote STOP signal is activated but the Shimadzu EI-D3403M turbo molecular pump does not decelerate?
    • Q
      qclaySep 2, 2025
      If the turbo molecular pump does not decelerate when the remote STOP signal is activated on your Shimadzu Power Supply, the REMOTE/LOCAL selection switch might be in the LOCAL position. Set the selection switch to the REMOTE position.

Summary

Introduction, Safety, and Product Identification

Precautions for Safe Operation

Provides essential safety warnings and guidelines for operating the equipment.

Installation Procedures

5.2 Connection of Power Cable

Details how to connect the power cable to the unit, including voltage and breaker requirements.

5.3 Connection of the Pump to the Power Supply Unit

Explains how to connect the control and motor cables between the pump and power supply.

Operation and Controls

6.3 Start-up Procedures

Explains the start-up sequence for both LOCAL and REMOTE operation modes.

6.4 Shutting Down Procedures

Provides precautions and a sequence for safely shutting down the turbo molecular pump.

Troubleshooting and Alarms

7.1 No Operation Issues

Troubleshooting steps for issues where the pump does not respond to operations.

7.5.3 Reset Procedure

Provides steps for resetting alarms and warnings after a problem is resolved.

Communications Interface

A5. TABLE OF COMMANDS

Lists all available commands and their corresponding character strings for unit control.

A6. COMMAND DESCRIPTION

Provides detailed descriptions of each command and its expected answers.

A9. TROUBLESHOOTING

Lists common communication issues and their troubleshooting steps.

Shimadzu EI-D3403M Specifications

General IconGeneral
BrandShimadzu
ModelEI-D3403M
CategoryPower Supply
LanguageEnglish

Related product manuals