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Shimadzu EI-D3403M User Manual

Shimadzu EI-D3403M
123 pages
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263-13228I
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Power Supply Unit for Turbo Molecular Pump
Model:EI-D1003M
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Model:EI-D3403M
Model:EI-D4203M
INSTRUCTION MANUAL

Table of Contents

Questions and Answers:

Shimadzu EI-D3403M Specifications

General IconGeneral
BrandShimadzu
ModelEI-D3403M
CategoryPower Supply
LanguageEnglish

Summary

Introduction, Safety, and Product Identification

Precautions for Safe Operation

Provides essential safety warnings and guidelines for operating the equipment.

Installation Procedures

5.2 Connection of Power Cable

Details how to connect the power cable to the unit, including voltage and breaker requirements.

5.3 Connection of the Pump to the Power Supply Unit

Explains how to connect the control and motor cables between the pump and power supply.

Operation and Controls

6.3 Start-up Procedures

Explains the start-up sequence for both LOCAL and REMOTE operation modes.

6.4 Shutting Down Procedures

Provides precautions and a sequence for safely shutting down the turbo molecular pump.

Troubleshooting and Alarms

7.1 No Operation Issues

Troubleshooting steps for issues where the pump does not respond to operations.

7.5.3 Reset Procedure

Provides steps for resetting alarms and warnings after a problem is resolved.

Communications Interface

A5. TABLE OF COMMANDS

Lists all available commands and their corresponding character strings for unit control.

A6. COMMAND DESCRIPTION

Provides detailed descriptions of each command and its expected answers.

A9. TROUBLESHOOTING

Lists common communication issues and their troubleshooting steps.

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