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Shimadzu EI-D3203M User Manual

Shimadzu EI-D3203M
123 pages
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263-13228I
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Power Supply Unit for Turbo Molecular Pump
Model:EI-D1003M
Model:EI-D1103M
Model:EI-D1303M
Model:EI-D2003M
Model:EI-D2203M
Model:EI-D2303M
Model:EI-D3203M
Model:EI-D3403M
Model:EI-D4203M
INSTRUCTION MANUAL

Table of Contents

Questions and Answers:

Shimadzu EI-D3203M Specifications

General IconGeneral
Input Frequency50/60 Hz
Input Voltage100 to 240 VAC
Operating Temperature0 to 50 °C
Storage Temperature-20 to 85 °C
ProtectionOvercurrent, Overvoltage, Short Circuit

Summary

Precautions and Safety

Installation Guidelines

Cable Handling Precautions

Provides precautions for safe installation, including cable handling and routing.

Identification and Function

Front Panel Controls and Indicators

Details the functions of the LCD, keys, lamps, and switches on the front panel.

Construction and Principle

Specifications

4.1 Power Supply Unit Specifications

Lists technical specifications for EI-Dxx03M models, including compatibility, communication, and power.

Installation Procedures

5.1 Power Supply Unit Installation

Covers location selection, rack mounting, and ensuring proper spacing for the unit.

5.2 Power Cable Connection

Provides instructions for connecting the power supply unit to the AC power source.

Operation Overview

Operation Procedures

Operation: Software and Remote Control

6.6 Software Operation

Explains the functions and operation of the power supply unit's software interface.

Troubleshooting Common Issues

7.1 Operation Issues

Troubleshooting steps for pump operation, acceleration, and deceleration problems.

Alarm and Warning Management

Alarm and Warning Tables

Lists alarm and warning codes, causes, and protective actions for troubleshooting.

Appendix A: Communications

A4. Serial Communications Protocol

Defines the message structure, timing, and checksum for serial communication.

A5. Table of Commands

Lists all available commands and answers for controlling and monitoring the power supply unit.

A6. Command Description

Explains the function and format of various commands and their corresponding answers.

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