7.5 Alarm Detection Capabilities
73
Power Supply Unit
INSTRUCTION MANUAL
7
LCD Display Possible Cause Remedy
Sect
ion
12
44=EI:CPU ERROR
66=MB:DSP ERROR
67=MB:DSP OVERFLOW
Abnormal operation
of circuit in the
power supply unit.
Check that the ambient temperature
around the power supply unit is within
the specified range.
Check that equipment causing noise is
not used around the power supply unit,
pump unit, motor cable, or magnetic
bearing cable.
4.1
5.1
5.2
5.3
13 48=EI:ACCEL OVERTIME
Rotation speed
does not increase
at start-up.
Check that the outlet and inlet pressures
are not too high.
Check for leakage.
Check that too much purge gas is not
flowing.
6.2
14 49=TMP:CAN NOT START
Pump does not
rotate.
Adhesion of reaction products or
damage to the protective bearing is the
possible cause. Remove the pump from
the unit and check that the rotor blades
rotate smoothly at the inlet. An overhaul
is required if blades do not rotate
smoothly.
15
51=MB:VIBRATION2 X1
52=MB:VIBRATION2 Y1
53=MB:VIBRATION2 X2
54=MB:VIBRATION2 Y2
55=MB:VIBRATION2 Z
56=MB:VIBRATION1 X1
57=MB:VIBRATION1 Y1
58=MB:VIBRATION1 X2
59=MB:VIBRATION1 Y2
60=MB:VIBRATION1 Z
Strong external
shock or vibrations.
If the shock or vibrations are transient,
re-acceleration is possible. If the shock
or vibrations occur frequently, stop the
pump and remove the source of the
shock or vibrations; or re-examine the
pump mounting method.
16
61=MB:SENSOR ERR. X1
62=MB:SENSOR ERR. Y1
63=MB:SENSOR ERR. X2
64=MB:SENSOR ERR. Y2
65=MB:SENSOR ERR. Z
Magnetic bearing
cable is not
connected
correctly.
Check the connection of the magnetic
bearing cable. Also check that the
connector pins are not bent. Turn off the
power supply before checking the
magnetic bearing cable. Never
disconnect the cable while the power is
on.
5.3
The rotor does not
move due to
adhering matter or
a damaged touch-
down bearing.
Remove the pump and check that the
rotor rotates smoothly. The pump
requires an overhaul if the rotor does not
rotate or the resistance to rotation is
large.
17
68=MB:BALANCE AXIS1
69=MB:BALANCE AXIS2
Rotor inside the
pump is out of
balance.
Adhesion of reaction products is a
possibility. An overhaul is required.
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