7.2 Power Failures
67
Power Supply Unit
INSTRUCTION MANUAL
7
7.2 Power Failures
When a power interruption occurs, the motor inside the turbo molecular pump immediately
begins regenerative braking. The magnetic bearing will use this generated electricity to keep
functioning and the rotor inside the turbo molecular pump will continue being levitated. The
rotation will slow down due to the regenerative braking and eventually the rotor will be supported
by the touchdown bearing. Table 7-2 shows the number of revolutions and period of time that will
elapse before being supported by the touchdown bearing, when the power fails at the rated
speed.
Table 7-2 Time and Rotational Speed During a Power Interruption Before Being
Supported by Touchdown Bearing
Note 1) Times are typical for regenerative braking from the rated speed.
Actual times will vary depending on vacuum conditions inside the pump and the
rotational speed when the power fails.
Pump Model
Power Supply
Model
Rotational Speed Before
Support by Touchdown
Bearing
Period of Time Before Support
by Touchdown Bearing
Note 1）
TMP-803M/MC/LM/LMC
TMP-1003M/MC/LM/LMC
EI-D1003M 7200rpm about 4 minutes
TMP-1103MP/MPC/LMP/LMPC EI-D1103M 7200rpm about 4.5 minutes
TMP-1303M/MC/LM/LMC EI-D1303M 7800rpm about 5.5 minutes
TMP-2003M/MC/LM/LMC EI-D2003M 5400rpm about 10 minutes
TMP-2203M/MC/LM/LMC EI-D2203M 5400rpm about 14 minutes
TMP-W2303LMC EI-D2303M 5400rpm about 14 minutes
TMP-3203M/MC/LM/LMC EI-D3203M 5400rpm about 15.5 minutes
TMP-3403LMC EI-D3403M 5400rpm about 17 minutes
TMP-4203LMC EI-D4203M 4200rpm about 22 minutes
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