Shimadzu EI-D3203M - Replacing EI-Xx03 Mz Power Supply Units

SECTION 6 OPERATION
62
263-13228
6
6.7.2.2 Replacing EI-xx03MZ Power Supply Units
If using the remote control signal for previous EI-xx03MZ power supply units (where "xx" is a
number that indicates the applicable pump type), then the following checks and changes to
settings are necessary when replacing the unit with an EI-Dxx03M model.
Change the "ALARM" signal and "REMOTE" signal activation settings from EI-03 to SEMI E74,
in accordance with the "Remote-Control Signal Settings" instructions included in the (4) Menu
Mode table of Section 6.6 "Software Operation".
(1) Connectors
The shape and pin count are both different. (See Figure 6-12)
(2) Pin Configuration
Different. (See Table 6-5)
(3) Signal Activity
Once the settings have been changed, it is compatible with SEMI 74 Standard Mode.
。
Remote-Control Connector Arrangement of Remote-Control Connector Pins
(The power supply unit rear panel attachment connectors,
as viewed from the front)
Fig. 6-10 Previous EI-xx03MZ Model Remote Control Connector and Pin Configuration
1
2
3
4567
8
9
10
11
12
13
1415
16
171819
20
21
22
23
2425
26
27
28
293031
32
3334
35
36
37