SECTION 4 SPECIFICATIONS
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263-13228
4
4.1 Power Supply Unit
Power supply unit model EI-D1003M EI-D1103M EI-D1303M EI-D2003M
Suitable pump
TMP-803M
TMP-803MC
TMP-803LM
TMP-803LMC
TMP-1003M
TMP-1003MC
TMP-1003LM
TMP-1003LMC
TMP-1103MP
TMP-1103MPC
TMP-1103LMP
TMP-1103LMPC
TMP-1303M
TMP-1303MC
TMP-1303LM
TMP-1303LMC
TMP-2003M
TMP-2003MC
TMP-2003LM
TMP-2003LMC
Exchangeable Compatibility
The control cable and the motor cable are interchangeable between any pump and
power supply unit.
Magnetic Bearing
5 axis control. No Battery is required.
(When power failure occur, magnetic bearing is support by regenerative power
from motor.)
Speed control Feedback control
Speed variation Speed is variable between 25% and 100% of the rated speed (set as 0.1%).
Display
LCD 20characters*2 lines (With LED back light)
LED POWER / ROTATION / NORMAL SPEED / ALARM
Communicatio
n
Contact
REMOTE (MR 34pin) Input : START / STOP / RESET / LOW SPEED Output :
ROTATION / ACC. / BRAKE / NORMAL REMOTE / ALARM / WARNING
Serial
RS-232C (D-sub 9pin male, Screw lock size:M2.6) / RS-485 (D-sub 9pin female,
Screw lock size:M2.6)
Alarm
Detection
Alarm
Pump Temperature
Pump Startup Failure,Overload,Overspin for motor
Magnetic Bearing failure
Power supply malfunction
(Over Temperature inside power supply, Fail drive circuit)
Power failure
Warning Failure of magnetic bearing
Protection
Alarm
ALARM LED lights, buzzer sounds, alarm description displayed on LCD.
Power failure:
Decelerates while maintaining magnetic levitation by regenerative breaking
power.
Levitation is stopped after deceleration, and the rotor is supported by the touch-
down bearing.
Once power is restored, restart is possible after resetting. (Refer to Section 7.2)
When other alarms occur:
Stops operation or decelerates. Magnetic levitation is continued
Warning
ALARM LED flashes, buzzer sounds, warning description displayed on LCD.Pump
operation continues.
Momentary power failure
If the electrical power is recovered in 1 second or less, then the power supply
operation prior to the electrical power failure is continued. No change output
signal.Otherwise, the turbo molecular pump rotor is decelerated.
If the power is disrupted over one second, the brake will engage. The pump can be
restarted after the reset operation.
Alarm history Stores the date, time and detected event information for the last 99 alarm events.
Input electric
power
Voltage
Single phase 200 to 240 VAC ± 10% (50 / 60 Hz ± 2 Hz)
Maximum
power
1.0 kVA 1.0 kVA 1.0 kVA 1.2 kVA
Insulation
withstand
voltage
1500 V，1
minutes
Mass
8 kg
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