Shimadzu EI-D1303M - User Manual

263-13228I
Read the instruction manual thoroughly before you use the product.
Keep this instruction manual for future reference.
Semiconductor Equipment Division
Power Supply Unit for Turbo Molecular Pump
Model:EI-D1003M
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Model:EI-D1303M
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INSTRUCTION MANUAL

Summary

Precautions for Safe Operation

Safety Warnings and Symbols

Explains safety symbols (WARNING, CAUTION, NOTICE) and provides crucial safety advice.

Section 4 Specifications

4.1 Power Supply Unit

Details specifications for the power supply unit, including electrical and environmental conditions.

Section 5 Installation

5.1 Installation of the Power Supply Unit

Provides an overview and general instructions for installing the power supply unit.

5.1.1 Location of the Power Supply Unit

Provides guidelines for selecting a suitable installation location to ensure proper operation.

5.1.2 Installation of the Power Supply Unit

5.2 Connection of Power Cable

Provides instructions and a table for correctly connecting the power cable to the unit.

5.3 Connection of the Pump to the Power Supply Unit

Details the procedure for connecting the control and motor cables between the pump and power supply.

Section 6 Operation

6.1 Outline

6.1.1 Introduction

6.2 Start-up Preparation

Details the step-by-step procedure for preparing the unit for start-up.

6.3 Start-up

Describes the sequence of actions for starting the pump.

6.4 Shutting Down

Outlines the steps for safely shutting down the pump.

6.5 Variable Speed Operation

Introduces the functionality and modes for variable speed operation.

6.6 Software Operation

6.7 Remote-Control Connector

Section 7 Troubleshooting

7.1 Nothing Happens After an Operation is Made

Provides a table to diagnose issues when the unit does not respond to operations.

7.2 Power Failures

Explains how the pump behaves during power interruptions and regenerative braking.

7.2.1 Power Failure Counter-Operation

Details counter-operations against power supply failures while the pump is running.

7.3 Vacuum Pressure Rise

7.4 Abnormal Noise and;or Vibration

7.5 Alarm Detection Capabilities

Explains how the system detects and reports alarms.

7.5.1 Movement in Alarm Detection Capabilities (ALARM)

Describes the system's response when an alarm condition is detected.

7.5.2 Movement in Alarm Detection Capabilities (WARNING)

Describes the system's response when a warning condition is detected.

7.5.3 Reset Procedure

Explains the procedure to reset the system after an alarm or warning condition.

Appendix A Communications

A1. GENERAL SPECIFICATION

A2. INTERFACE SPECIFICATION

A2.1 RS-232 C

A2.2 RS-485

A3. POWER SUPPLY TO COMPUTER CONNECTION

A3.1 Communication Cable Connection

A4. SERIAL COMMUNICATIONS PROTOCOL

A4.1 Basic Message Structure

A5. TABLE OF COMMANDS

A6. COMMAND DESCRIPTION

A6.1 Operation Mode

A6.2 Operation

A6.3 Run Status

A6.4 Parameters

A6.5 Events

A6.6 Timer

A6.7 History

A6.8 Settings

A7. RS-232 C COMMANDS; ANSWERS

A8. RELATION OF LOCAL MODE TO REMOTE MODE OPERATIONS

A9. TROUBLESHOOTING

Provides guidance for diagnosing and resolving communication-related issues.

A9.1 No Message can Transmit and Receive

Troubleshooting steps for communication issues where no data is transmitted or received.

A9.2 Sending and Receiving are Done, But Receivable Messages are Invalid

Troubleshooting steps for cases where communication occurs but data is corrupted.

A9.3 Characters Get Disordered from Time to Time, Then Resulting in CHECKSUM Error

Troubleshooting steps for character disorder and checksum errors, often related to noise or cable issues.

Shimadzu EI-D1303M Specifications