Introduction
v
Power Supply Unit
INSTRUCTION MANUAL
○ Installation Precautions
Do not apply abnormal loads to the turbo molecular pump control cable plug and/or connector.
Abnormal loads may cause cable disconnection.
(1) Do not pull the turbo molecular pump control cable by the connector or plug.
(2) When installing the power supply unit into equipment, do not allow any electrical cables to
be in tension or to have very tight bending radii.
(3) Do not bundle the turbo molecular pump control cable with any cables.
(4) Do not twist the turbo molecular pump control cable during connection.
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