Introduction
i
Power Supply Unit
INSTRUCTION MANUAL
Introduction
Thank you for choosing the EI-Dxx03M Power Supply Unit for Turbo Molecular Pump
(hereafter referred to as "power supply unit" or "EI-Dxx03M"). Please read the instruction
manual carefully before using the power supply unit, and save the instruction manual for
future reference.
This instruction manual explains detailed operations of the power supply unit and cables.
For instructions regarding the pump unit, please refer to the instruction manual for the pump
unit to be used.
Standard type is explained in this manual. For special order type, please refer to the out-
lines and constructions of each specification.
Copyrights and Disclaimers
This document is copyrighted by Shimadzu Corporation. Please refrain from reproducing
or copying part or all of this document without permission from Shimadzu.
In an effort to improve the product, this document may be revised in the future without
notice.
Every effort has been made to prepare an accurate and complete manual, but if an error
or omission should be discovered, revisions might not be possible immediately.
Shimadzu does not take responsibility for any effects that may result from the use of this
manual.
Copyright 2003-2006 Shimadzu Corporation.All rights reserved.
©
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