Shimadzu EI-D3203M - Vacuum Pressure Rise; Abnormal Noise And;Or Vibration; Alarm Detection Capabilities; Movement in Alarm Detection Capabilities (ALARM)

7.3 Vacuum Pressure Rise
69
Power Supply Unit
INSTRUCTION MANUAL
7
7.3 Vacuum Pressure Rise
A rapid rise of vacuum pressure in the turbo molecular pump causes the internal motor of the
turbo molecular pump to start braking and the ALARM lamp (Fig. 2-3 (14)) lights.
7.4 Abnormal Noise and/or Vibration
Should the turbo molecular pump ever generate abnormal noise and/or vibration, the turbo
molecular pump operation is to be stopped immediately.
But there is possible that a race of touch-down bearing (Fig. 3-1 (9)) may make sounds for
seconds when the pump internal pressure gets back to atmospheric pressure using air (or non-
activity gas). This phenomena is not abnormal and make no damage to the pump, because the
air whirlpool sometimes occurs and then makes the touch-down bearing rotate slightly.
CAUTION
When turning the POWER switch for the power supply unit on or off, a "clunk" sound may be
heard from inside the pump. This sound is from the rotor inside the pump being levitated or de-
levitated. This is normal.
7.5 Alarm Detection Capabilities
The fault detection functions shown in Table 7-6 "Table of Alarms" and Table 7-7 "Table of
Warnings" are incorporated for protection in the event of a problem with the turbo molecular
pump or power supply unit.
When an error is detected, check the ALARM lamp (Fig. 2-3 (14)) and the alarm mode display
on the front panel (See Section 6.6 "Software Operation" (2)) and refer to Tables 7-4 and 7-5 for
the appropriate remedy.
7.5.1 Movement in Alarm Detection Capabilities (ALARM)
1. ALARM lamp (FIg. 2-1 (14)) lights.
2. Alarm description is displayed on LCD.
3. The remote-control connector "ALARM" signal turn ON.
4. The buzzer sounds.