SECTION 7 TROUBLESHOOTING
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7
7.1 Nothing Happens After an Operation is Made
Table 7-1 Nothing Happens After an Operation is Made
PROBLEM
POSSIBLE CAUSES CORRECTIVE ACTION
1
Power ON/OFF switch
in the ON position but
the turbo molecular
pump fails to operate.
Electrical power cable not properly
connected.
Properly connect the electrical power cable.
Electrical power outside power
supply unit’s power range.
Operate within power supply unit’s power
range.
Blown fuse (F1, F2) Replace blown fuse.
POWER switch fails to the off
position.
Replace POWER switch. Consult the
nearest Shimadzu service company.
2
START switch
pressed but turbo
molecular pump does
not accelerate.
REMOTE/LOCAL selection switch
in the REMOTE position.
Set the REMOTE/LOCAL selection switch
in the LOCAL position.
Other causes. Check the power supply unit’s ALARM lamp
is not ON. If an alarm is indicated, correct
the malfunction and reset the power supply
unit.
3
Remote “START”
signal active but the
turbo molecular pump
does not accelerate.
REMOTE/LOCAL selection switch
in LOCAL position.
Set the selection switch in the REMOTE
position.
“STOP” signal active. Deactivate “STOP” signal.
Other problems. Check the unit’s ALARM lamp is not ON. If
an alarm is indicated, correct the
malfunction and reset the power supply unit.
4
STOP switch pressed
but the turbo
molecular pump does
not decelerate.
REMOTE/LOCAL selection switch
is in the REMOTE position.
Set the selection switch in the LOCAL
position.
5
Remote “STOP”
signal activated but
the turbo molecular
pump does not
decelerate.
REMOTE/LOCAL selection switch
is in the LOCAL position.
Set the selection switch in the REMOTE
position.
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