6.4 Shutting Down
37
Power Supply Unit
INSTRUCTION MANUAL
6
6.4 Shutting Down
CAUTION
After having operated the turbo molecular pump for evacuation of corrosive gas, keep the
pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump
internal would cause rapid corrosion trouble of the pump internals. The pump corrosion may
result in damaging the vacuum vessel interior and other units, causing pressure fluctuation by
stopping the pump and dispersal of parts.
CAUTION
When reducing internal pressure of the turbo molecular pump up to around the atmospheric
pressure by use of inert gas, etc., adjust the pressure reducing valve so that the internal pressure
of the same pump does not exceed 20 kPa [GAUGE].
For shut-down of the turbo molecular pump, follow the sequence below.
6.4.1 Preparations Prior to Shutting Down Operation
(1) Check that process gas inflow is in complete stop. When main valve is provided between
the turbo molecular pump and vacuum chamber, close the valve, too.
(2) When purge gas is being fed into the turbo molecular pump, stop the gas feed, too.
(3) When forevacuum valve is provided between the turbo molecular pump and backing
vacuum pump, close the valve, too.
6.4.2 Shutting Down Sequence in LOCAL Mode
(1) Press the STOP switch (Fig. 2-1 (7)) and check that the indication on the pump monitor
mode/operation mode LCD switches from "NORMAL" to "BRAKE."
Then the NORMAL SPEED lamp (Fig. 2-1 (12)) goes off.
(2) Wait until the ROTATION lamp (Fig. 2-1 (11)) goes out . The pump monitor mode/
operation mode LCD switches from "BRAKE" to "STOP."
(3) Turn off the power supply unit POWER switch (Fig. 2-2 (17)).
(4) Stop the cooling water flow.
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