6.1 Outline
31
Power Supply Unit
INSTRUCTION MANUAL
6
Fig. 6-3 Shutting down Flowchart
Shutting down flowchart
Stop process gas flow?
Stop purge gas?
Close valve between
backing vaccum pump?
Stop process gas flow.
Stop purge gas.
Close valve.
Press STOP switch.
Turn POWER switch from
1 (ON) to 0 (OFF).
Input "STOP" signal.
"NORMAL" signal output OFF.
"BRAKE" signal output ON.
"ROTATION" signal output OFF.
"BRAKE" signal output OFF.
Stop cooling water.
LOCAL
operation
REMOTE
operation
NO
YES
NO
YES
NO
YES
No valve
No purge gas
ROTATION lamp goes out.
LCD monitor mode/operation mode
Display : "BRAKE" "STOP"
NORMAL SPEED lamp goes out.
LCD monitor mode/operation mode
Display : "NORMAL" "BRAKE"
Pump shutting down.
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