7.5 Alarm Detection Capabilities
71
Power Supply Unit
INSTRUCTION MANUAL
7
Table 7-4 If the ALARM Lamp Lights
LCD Display Possible Cause Remedy
Secti
on
1
11=TD COUNTER
LIMIT
12=PF COUNTER
LIMIT
The number of high speed
or power failure touch-
downs has exceeded the
prescribed number.
The touch-down bearing may have
deteriorated. Consult Shimadzu or an
approved service company regarding
replacement of the touch-down bearing.
2
13=WRONG TMP
MODEL
The models of pump and
power supply do not
match.
Check the combination of the pump and
power supply models.
Check the connection of the magnetic
bearing cable. Also check that the
connector pins are not bent. Turn off the
power supply before checking the
magnetic bearing cable. Never disconnect
the cable while the power is on.
5.3
3
14=AC LOW
VOLTAGE
15=POWER FAILURE
Power failure or reduction
in the power supply
voltage.
Wait for the power to be restored. An
unfamiliar sound will be heard a few
minutes after a power failure. This sound
occurs when the rotor contacts the
protective bearing as magnetic levitation
cannot be maintained. This is not an
abnormal sound.
POWER switch was
turned off by mistake.
Wait about 5 seconds before turning the
POWER switch back on. Re-acceleration
is possible after resetting and start-up.
4 16=TMP:OVERLOAD
Drop in rotation speed
during rotation at rated
speed (increased internal
pump pressure).
Check that the outlet and inlet pressures
are below the specified maximum
pressures.
Check for leakage.
Check that too much purge gas is not
flowing.
Check that process gas flow rate is not too
high.
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